- Contact Person : Mr. Yao Robin
- Company Name : Beijing Zhongfu Huanhai Import & Export Company Ltd.
- Tel : 0086-10-62260590
- Fax : 0086-10-62224826
- Address : Beijing,Beijing,Rm 304,No. 17, East Jiaoda Road
- Country/Region : China
- Zip : 100088
used vacuum coating machine
Detailed Product Description
Project : HD-1000 Multi-Arc Ion/ Sputtering Plating Deposition System
1. Configuration
vacuum chamber | F1250 x 1000 mm2 |
effective plating space | F980 x 650 mm2 |
vacuum ratio limit | 6.7 x 10-4 Pa |
Pump air time(from standard air pressure to 4.0*10-3Pa at room temperature) | < 15 min |
Plating time (decorative plating, tool plating) | ~ 50 min |
(380-400V, 50-60 Hz) Total power(380-400V, 50-60 Hz) | 80 kVA |
Cooling water Cycle | 3.5 Ton / hr 2.0 kg/cm2, 20±5 °C |
Cover space | 6 x 6 x 3.5 m3 |
application | Decoration coating & tool coating |
Body | 1 SET |
1)- Vacuum chamber with water cooler | 1 set |
2)- Rigidity-strengthened arch front-door with two observation holes | 1 set |
3)- Workpiece rotation holder . 12 pieces of pothooks combining self-rotation movement (diameter 200mm) with co-rotation | 1 set |
Vacuum chamber inner ceiling board | 2 sets |
Arc cathode source flanges installed on the side wall of the body | 6 pcs |
6)-Outer magnetron control source flanges installed on the side wall of the body | 2 pcs |
7)-Vacuum chamber electrical heating tube flange installed on the soleplate of the body | 1 set |
8)-Pedestal of the vacuum chamber | 1 set |
2- Vacuum-obtaining system | 1 SET |
1)LlanZhou K-400T oil diffusing pump with automatic temperature controller | 1 set |
2)- Kinney sliding vane rotary vacuum pump 2X-70 | 1 set |
3)- Kinney sliding vane rotary vacuum pump 2X-300 | 1 set |
4)- Roots vacuum pump zjp-300 | 1 set |
5)- GDQ-J400 higher vacuum valve | 1 set |
6)GDQ-J200 | 1 set |
7)- vacuum valves and pipes | 1 set |
8)- Pneumatic transmission system | 1 set |
3- Compound vacuum gauges (one ionization vacuum gauge, two thermocouple vacuum gauges) | 1 SET |
4- Quadruplex gas quality & flow control system | 1 SET |
5- hexad reaction gas distribution system | 1 SET |
6- (LMI717/69B and LMO717/69B) rectangle Non-equilibrium close magnetic field magnetron sputtering control sources group. | 2 PAIRS |
magnetron sputtering power sourcess | 2 SETS |
8- 7# arc ion evaporator source (RCAE1047) with automatic Striking Arc system and arc discharge. | 6 SETS |
9- vacuum arc power: inverter power supply 250A | 6 SETS |
pulsed bias 30KW | 1 SET |
11- Frequency conversion speed regulator control the motor of workpiece rotation holder. | 1 SET |
Workpiece electrical heating system 12- high-capacity central electrical heating tube | 1 SET |
13- PLC control system and integrated control panel | 1 SET |
14- Power Output control cabinet | 1 SET |
